Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.
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Optical and X-Ray Characterization
This course is part of Semiconductor Characterization Specialization
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Instructor: Trevor Thornton
Sponsored by Abu Dhabi National Oil Company
Course
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What you'll learn
Describe the use of light to measure the thickness and refractive index of thin transparent films.
Explain how light is absorbed and emitted by semiconductors.
Explain the advantages and limitations of optical and X-ray characterization.
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5 quizzes
Course
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There are 6 modules in this course
Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.
What's included
1 video2 readings
This week introduces the concept of reflectance spectroscopy: a rapid, convenient, and non-destructive technique for measuring the thickness of transparent materials.
What's included
2 videos1 reading1 quiz
This week, you will learn about ellipsometry, a powerful technique that allows us to extract the thickness and refractive index of transparent layers as thin as a few nanometers.
What's included
1 video1 reading1 quiz
This week, you will learn about photoluminescence.
What's included
1 video1 reading1 quiz
This week, you will learn about electron microprobe X-ray analysis.
What's included
2 videos1 quiz
This week, you will complete a case study to assess your ability to analyze electron microprobe x-ray images to determine the constituent elements in a 40 nm MOSFET.
What's included
1 video1 reading1 quiz
Instructor
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